Tuning the Mechanical Properties of Poly-silicon Film by...

Tuning the Mechanical Properties of Poly-silicon Film by Surface Modification Using Plasma Treatment

Su, Wang-Shen, Fang, Weileun, Tsai, Ming-Shih
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Volume:
820
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-820-O8.9
Date:
January, 2004
File:
PDF, 742 KB
english, 2004
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