Metal-Organic Chemical Vapor Deposition (MOCVD) of GeSbTe-based Chalcogenide Thin Films
Tompa, Gary S., Sun, Shangzhu, Rice, Catherine E, Cuchiaro, Joe, Dons, EdwinVolume:
997
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0997-I10-08
Date:
January, 2007
File:
PDF, 828 KB
english, 2007