Surface Morphology and Electric Property of the AlGaN/AlN/GaN Multilayers with Varying the AlN Thickness
Huang, Shih-Chun, Chen, Wen-Ray, Lin, Jia-Ching, Chang, Kuo-Jen, Lin, Wen-Jen, Wang, Li-ChunVolume:
1515
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.1095
Date:
January, 2013
File:
PDF, 559 KB
english, 2013