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Electrodeposition of CoMoP thin film as diffusion barrier layer for ULSI applications
Z. Abdel Hamid, A. Abdel Aal, Ali Shaaban, H.B. HassanVolume:
203
Year:
2009
Language:
english
Pages:
9
DOI:
10.1016/j.surfcoat.2009.06.004
File:
PDF, 1008 KB
english, 2009