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Composition–constitution–morphology relationship of Al2O3 thin films deposited by plasma assisted chemical vapor deposition
Rony Snyders, Kaiyun Jiang, Denis Music, Stephanos Konstantinidis, Torsten Markus, Alexander Reinholdt, Joachim Mayer, Jochen M. SchneiderVolume:
204
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.surfcoat.2009.07.019
File:
PDF, 1.15 MB
english, 2009