Experimental thermodynamics for the evaluation of ALD...

Surface and Coatings Technology 2009 Vol. 204; Iss. 6-7

Experimental thermodynamics for the evaluation of ALD growth processes

P. Violet, E. Blanquet, D. Monnier, I. Nuta, C. Chatillon
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Volume:
204
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2009.08.022
File:
PDF, 551 KB
english, 2009
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