![](/img/cover-not-exists.png)
Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD
C. Chouquet, G. Gerbaud, M. Bardet, S. Barrat, A. Billard, F. Sanchette, C. DucrosVolume:
204
Year:
2010
Language:
english
Pages:
8
DOI:
10.1016/j.surfcoat.2009.09.016
File:
PDF, 678 KB
english, 2010