Corrosion-resistant metal layers from a CMOS process for...

Surface and Coatings Technology 2010 Vol. 204; Iss. 12-13

Corrosion-resistant metal layers from a CMOS process for bioelectronic applications

M. Birkholz, K.-E. Ehwald, D. Wolansky, I. Costina, C. Baristiran-Kaynak, M. Fröhlich, H. Beyer, A. Kapp, F. Lisdat
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Volume:
204
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2009.09.075
File:
PDF, 688 KB
english, 2010
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