Etching of carbon–tungsten composite with oxygen plasma
A. Vesel, M. Mozetič, P. Panjan, N. Hauptman, M. Klanjsek-Gunde, M. Balat-PichelinVolume:
204
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2009.09.082
File:
PDF, 1.14 MB
english, 2010