Hafnium Aluminates Deposited by Atomic Layer Deposition:...

ECS Transactions 2012 / 08 Vol. 49; Iss. 1

Hafnium Aluminates Deposited by Atomic Layer Deposition: Structural Characterization by X-ray Spectroscopy

Huanca, D. R., Christiano, V., Adelmann, C., Kellerman, G., Verdonck, P., dos Santos Filho, S. G.
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Volume:
49
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/04901.0383ecst
Date:
August, 2012
File:
PDF, 606 KB
english, 2012
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