High power pulsed magnetron sputtering: A review on...

Surface and Coatings Technology 2010 Vol. 204; Iss. 11

High power pulsed magnetron sputtering: A review on scientific and engineering state of the art

K. Sarakinos, J. Alami, S. Konstantinidis
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Volume:
204
Year:
2010
Language:
english
Pages:
24
DOI:
10.1016/j.surfcoat.2009.11.013
File:
PDF, 4.10 MB
english, 2010
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