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Low Temperature Copper Deposition by PE-ALD
Mao, Jiajun, Eisenbraun, Eric, Omarjee, Vincent, Lanslot, Clement, Dussarrat, ChristianVolume:
1195
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1195-B12-05
Date:
January, 2009
File:
PDF, 1.67 MB
english, 2009