Comparison of Phosphosilicate Glass Films Deposited by...

Comparison of Phosphosilicate Glass Films Deposited by Three Different Chemical Vapor Deposition Methods

Shioya, Yoshimi
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Volume:
133
Year:
1986
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2109054
File:
PDF, 1.45 MB
english, 1986
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