Modelling of sputtering yield amplification effect in...

Modelling of sputtering yield amplification effect in reactive deposition of oxides

T. Kubart, T. Nyberg, A. Pflug, M. Siemers, M. Austgen, D. Koehl, M. Wuttig, S. Berg
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Volume:
204
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2010.05.006
File:
PDF, 453 KB
english, 2010
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