Data Bases for Modeling Plasma Devices for Processing of...

Materials Science Forum 2004 Vol. 453-454

Data Bases for Modeling Plasma Devices for Processing of Integrated Circuits

Nikitović, Željka, Šašić, O., Petrović, Z.Lj., Malović, G.N., Strinić, A., Dujko, S., Raspopović, Z., Radmilović-Radjenović, M.
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Volume:
453-454
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.453-454.15
File:
PDF, 341 KB
english, 2004
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