Effects of Different Post-Implantation Annealing Conditions on the Electrical Properties of Interfaces to p-Type Implanted 4H-SiC
Frazzetto, Alessia, Roccaforte, Fabrizio, Giannazzo, Filippo, Lo Nigro, R., Saggio, M., Zanetti, Edoardo, Raineri, VitoVolume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.825
Date:
May, 2012
File:
PDF, 307 KB
english, 2012