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Etch characteristics of gallium indium zinc oxide thin films in a HBr/Ar plasma
Eun Ho Kim, Yu Bin Xiao, Seon Mi Kong, Chee Won ChungVolume:
205
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.surfcoat.2010.07.084
File:
PDF, 877 KB
english, 2010