Nano-crystalline silicon thin films grown by the inductively coupled plasma assisted CFUBM at low temperature
Kyung S. Shin, Yoon S. Choi, In S. Choi, Y. Setsuhara, Jeon G. HanVolume:
205
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.surfcoat.2010.07.086
File:
PDF, 497 KB
english, 2010