Effects of substrate temperature on physical properties of...

Effects of substrate temperature on physical properties of amorphous carbon film synthesized under atmospheric pressure

Takayuki Sakata, Hideyuki Kodama, Hidetaka Hayashi, Toshihisa Shimo, Tetsuya Suzuki
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Volume:
205
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.surfcoat.2010.08.139
File:
PDF, 467 KB
english, 2010
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