Raman Investigation of Stress for Shallow Trench

Defect and Diffusion Forum 2007 Vol. 265

Raman Investigation of Stress for Shallow Trench

Sang, Sheng Bo, Xue, Cheng Yang, Zahng, Wen Dong, Xiong, Ji Jun
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Volume:
265
Year:
2007
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.265.1
File:
PDF, 295 KB
english, 2007
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