Microstructure and tribological properties of the a-C:H films deposited by magnetron sputtering with CH4/Ar mixture
Yongxia Wang, Yinping Ye, Hongxuan Li, Li Ji, Yongjun Wang, Xiaohong Liu, Jianmin Chen, Huidi ZhouVolume:
205
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2011.03.120
File:
PDF, 770 KB
english, 2011