Characterization of Deep Levels in High-Resistive 6H-SiC by Current Deep Level Transient Spectroscopy
Kato, Masashi, Kito, Kosuke, Ichimura, MasayaVolume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.381
File:
PDF, 400 KB
english, 2009