The Influence of External Load and Air Pressure on Air Slide Table Performance of Ultra Precision Machines in Nano Machining
Vahdati, Mehrdad, Shokuhfar, Ali, Bagheri, MeysamVolume:
283-286
Year:
2009
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.283-286.177
File:
PDF, 1.94 MB
english, 2009