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Complex, 3D Photonic Crystals Fabricated by Atomic Layer Deposition
King, J. S., Gaillot, D., Yamashita, T., Neff, C., Graugnard, E., Summers, C. J.Volume:
846
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-846-DD12.2
Date:
January, 2004
File:
PDF, 1.85 MB
english, 2004