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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A novel fabrication and wafer level hermetic sealing method for SOI-MEMS devices using SOI cap wafers
Torunbalci, Mustafa Mert, Alper, Said Emre, Akin, TayfunYear:
2015
Language:
english
DOI:
10.1109/memsys.2015.7050976
File:
PDF, 1.62 MB
english, 2015