Silicon Carbide Surface Modification by Nitrogen Plasma...

Materials Science Forum 2012 / 8 Vol. 727-728

Silicon Carbide Surface Modification by Nitrogen Plasma Expander

Santos, Carlos N., Marins, Eleasar M., Machida, Munemasa, de Campos, Élson, Mota, Rogério Pinto, de Melo, Francisco Cristóvão Lourenço, Hein, Luis R. Oliveira
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Volume:
727-728
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.727-728.1428
Date:
August, 2012
File:
PDF, 903 KB
english, 2012
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