The combined study of the organosilicon films by RBS, ERDA and AFM analytical methods obtained from PECVD and PACVD
A. Mackova, V. Perina, Z. Stryhal, J. Pavlik, M. Svec, A. Quédé, P. Supiot, G. Borvon, A. Granier, P. RaynaudVolume:
566-568
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.susc.2004.06.072
File:
PDF, 283 KB
english, 2004