Band Engineering of Ru∕Rutile-TiO2∕Ru Capacitors by Doping Cobalt to Suppress Leakage Current
Tonomura, Osamu, Sekiguchi, Tomoko, Inada, Naomi, Hamada, Tomoyuki, Miki, Hiroshi, Torii, KazuyoshiVolume:
159
Year:
2012
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.040201jes
File:
PDF, 331 KB
english, 2012