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[ECS ISTC/CSTIC 2009 (CISTC) - Shanghai, China (March 19 - March 20, 2009)] ECS Transactions - Cu/Low-k Thickness Measurement for Advanced Cu CMP Process Development and Control
Li, Yunlong, Heylen, Nancy, Delande, Tinne, Kellens, Kristof, Ong, Patrick, Leunissen, Leonardus, Tarnowka, Alexandre, Eliyahu, AvivYear:
2009
Language:
english
DOI:
10.1149/1.3096485
File:
PDF, 410 KB
english, 2009