Etching of hexagonal SiC surfaces in chlorine-containing...

Surface Science 2006 Vol. 600; Iss. 11

Etching of hexagonal SiC surfaces in chlorine-containing gas media at ambient pressure

A.V. Zinovev, J.F. Moore, J. Hryn, M.J. Pellin
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Volume:
600
Year:
2006
Language:
english
Pages:
10
DOI:
10.1016/j.susc.2006.03.011
File:
PDF, 336 KB
english, 2006
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