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Initial stage of nitridation on Si(1 0 0) surface using low-energy nitrogen ion implantation
Ki-jeong Kim, Tai-Hee Kang, Kyuwook Ihm, Chulho Jeon, Chan-Cuk Hwang, Bongsoo KimVolume:
600
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.susc.2006.07.015
File:
PDF, 373 KB
english, 2006