Metal organic chemical vapor deposition of ultrathin ZrO2...

Surface Science 2007 Vol. 601; Iss. 4

Metal organic chemical vapor deposition of ultrathin ZrO2 films on Si(1 0 0) and Si(1 1 1) studied by electron spectroscopy

P.G. Karlsson, J.H. Richter, J. Blomquist, P. Uvdal, T.M. Grehk, A. Sandell
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Volume:
601
Year:
2007
Language:
english
Pages:
11
DOI:
10.1016/j.susc.2006.11.038
File:
PDF, 354 KB
english, 2007
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