Initial oxidation of HF-acid treated...

Initial oxidation of HF-acid treated Si(1 0 0) surfaces under air exposure studied by synchrotron radiation X-ray photoelectron spectroscopy

F. Hirose, M. Nagato, Y. Kinoshita, S. Nagase, Y. Narita, M. Suemitsu
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Volume:
601
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.susc.2007.03.034
File:
PDF, 170 KB
english, 2007
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