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RHEED studies during growth of TiN/SiNx/TiN trilayers on MgO(0 0 1)
Hans Söderberg, Jens Birch, Lars Hultman, Magnus OdénVolume:
601
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.susc.2007.04.001
File:
PDF, 480 KB
english, 2007