Tribological Aspects of AlN-TiN Thin Composite Films
Waters, C., Young, G., Yarmolenko, S., Wang, X., Sankar, J.Volume:
843
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-843-T3.40
Date:
January, 2004
File:
PDF, 813 KB
english, 2004