![](/img/cover-not-exists.png)
Large-Area Organosilicon Film Deposition Using Cyclonic Atmospheric Pressure Glow Discharge
Lin, Jin-He, Tsai, Ching-Yuan, Liu, Wei-Ting, Syu, Yu-Kai, Huang, ChunVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.05EA01
Date:
May, 2013
File:
PDF, 900 KB
english, 2013