Liquid Phase Epitaxy of 4H-SiC Layers on On-Axis PVT Grown...

Materials Science Forum 2009 Vol. 615-617

Liquid Phase Epitaxy of 4H-SiC Layers on On-Axis PVT Grown Substrates

Kusunoki, Kazuhiko, Kamei, Kazuhito, Yashiro, Nobuyoshi, Hattori, Ryo
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Volume:
615-617
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.615-617.137
File:
PDF, 827 KB
english, 2009
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