![](/img/cover-not-exists.png)
A kinetic Monte Carlo study of the initial stage of silicon oxidation: Basic mechanisms-induced partial ordering of the oxide interfacial layer
Anne Hémeryck, Alain Estève, Nicolas Richard, Mehdi Djafari Rouhani, Georges LandaVolume:
603
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.susc.2009.04.014
File:
PDF, 1.18 MB
english, 2009