Single Wafer Hydrophobic Surface Preparation on 300mm by HF...

Solid State Phenomena 2008 Vol. 134

Single Wafer Hydrophobic Surface Preparation on 300mm by HF Vapor

Salvetat, Thierry, Pollet, Olivier, Besson, Pascal, Rochat, Névine
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
134
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.134.11
File:
PDF, 305 KB
english, 2008
Conversion to is in progress
Conversion to is failed