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Improving the dielectric constant of Al2O3 by cerium substitution for high-k MIM applications
Rakesh Sohal, Grzegorz Lupina, Olaf Seifarth, Peter Zaumseil, Christian Walczyk, Thomas SchroederVolume:
604
Year:
2010
Language:
english
Pages:
7
DOI:
10.1016/j.susc.2009.11.017
File:
PDF, 815 KB
english, 2010