[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Large-deflection out-of-plane electrostatic buckled-electrode actuators
Kim, H.S., Najafi, K., Washabaugh, P.D., Bernal, L.P.Volume:
1
Year:
2003
Language:
english
DOI:
10.1109/SENSOR.2003.1215593
File:
PDF, 390 KB
english, 2003