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Assistant Anode in a Cathodic Arc Plasma Source
Tao, Zhang, Hui-Xing, Zhang, Brown, Ian G, Chu, Paul KVolume:
18
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/18/8/336
Date:
August, 2001
File:
PDF, 172 KB
english, 2001