Growth of AlGaN Epitaxial Film with High Al Content by...

Chinese Physics Letters 2007 / 03 Vol. 24; Iss. 3

Growth of AlGaN Epitaxial Film with High Al Content by Metalorganic Chemical Vapour Deposition

Xiao-Lan, Wang, De-Gang, Zhao, Hui, Yang, Jun-Wu, Liang
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Volume:
24
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307x/24/3/051
Date:
March, 2007
File:
PDF, 317 KB
english, 2007
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