A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation
Fainer, N.I., Maximovski, E.A., Kosinova, M.L., Rumyantsev, Yu.M.Volume:
378-381
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.378-381.493
File:
PDF, 416 KB
2001