ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Active Area Width and Topography Effects on Sub 45nm Poly Gate CD
Shen, Man-Hua, Meng, Xiao-Ying, Huang, Yi, Zhang, Hai-Yang, Chang, Shih-Mou, Lee, Kwok-Fung, Gu, YimingYear:
2011
Language:
english
DOI:
10.1149/1.3567597
File:
PDF, 408 KB
english, 2011