Theory of Si-Rich SiC Surfaces: Consequences for Epitaxial...

Theory of Si-Rich SiC Surfaces: Consequences for Epitaxial Growth

Furthmüller, J., Käckell, P., Bechstedt, Friedhelm, Fissel, Andreas, Pfennighaus, K., Schröter, B., Richter, W.
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Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.339
File:
PDF, 346 KB
1998
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