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SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - Direct laser beam interference patterning technique for fast high aspect ratio surface structuring
Roth, Stephan, Nakata, Yoshiki, Neuenschwander, Beat, Xu, Xianfan, Indrisiunas, Simonas, Voisiat, Bogdan, Žukauskas, Airidas, Račiukaitis, GediminasVolume:
9350
Year:
2015
Language:
english
DOI:
10.1117/12.2079826
File:
PDF, 2.22 MB
english, 2015