SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Step and Repeat UV nanoimprint lithography tools and processes
McMackin, Ian, Choi, Jin, Schumaker, Philip, Nguyen, Van, Xu, Frank, Thompson, Ecron, Babbs, Daniel, Sreenivasan, S. V., Watts, Mike, Schumaker, Norman, Mackay, R. ScottVolume:
5374
Year:
2004
Language:
english
DOI:
10.1117/12.538733
File:
PDF, 690 KB
english, 2004