![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, USA (Sunday 12 August 2012)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - High-rate, roll-to-roll nanomanufacturing of flexible systems
Cooper, Khershed P., Wachter, Ralph F., Postek, Michael T., Coleman, Victoria A., Orji, Ndubuisi G.Volume:
8466
Year:
2012
Language:
english
DOI:
10.1117/12.940775
File:
PDF, 283 KB
english, 2012