SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Dimensional Optical Metrology and Inspection for Practical Applications II - Calibration of high-aspect ratio quality control optical scanning system
Karadzhinova, Aneliya, Hildén, Timo, Heino, Jouni, Berdova, Maria, Lauhakangas, Rauno, Garcia, Francisco, Tuominen, Eija, Kassamakov, Ivan, Harding, Kevin G., Huang, Peisen S., Yoshizawa, ToruVolume:
8839
Year:
2013
Language:
english
DOI:
10.1117/12.2024100
File:
PDF, 936 KB
english, 2013